A calibrated, built-in temperature sensor allows to measure the current chip temperature at the field sensitive volume. The sensor provides high analog bandwidth from DC to 3kHz.
The application of the spinning-current technique in the biasing of the Hall elements significantly suppresses offset, low-frequency noise, and the planar Hall effect. The applied CMOS technology enables high precision in the fabrication of the vertical and horizontal Hall elements, which gives high angular accuracy of the three measurement axis. This allows for very high spatial resolution of the sensor. The integrated Hall elements are very compact and occupy a small area of about 1 x 1 μm 2. The sensor incorporates three groups of mutually orthogonal Hall-effect elements (one horizontal and two vertical) with biasing circuits and amplifiers for each of them. GENERAL DESCRIPTION The SENIS 3DHALL sensor SENM3Dx is a CMOS integrated magnetic field sensor that allows the acquisition of all three magnetic-field components (Bx, By and Bz) at the same time and at the same spot.
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